After fabrication of cantilever array, it is found that it cannot meet expected efficiency. What are probable causes behind this?
Cantilevers may be destroyed by etch process
Cantilevers may be buckled up due to stress gradient
Cantilevers may not be released properly
All of these
All of the above reasons could potentially lead to a decrease in the expected efficiency of a fabricated cantilever array. Let me explain each probable cause in more detail:
1. Cantilevers being destroyed by the etch process: The etch process involves selectively removing material from the cantilevers to create the desired structure. If the etching process is not optimized or controlled properly, it can lead to excessive material removal and cause the cantilevers to be destroyed or weakened. This can drastically affect their performance and reduce their efficiency.
2. Cantilevers getting buckled up due to stress gradient: During fabrication, stress can be induced in the cantilevers due to the deposition and etching processes. If the stress gradient is not properly managed or released, it can cause the cantilevers to buckle or warp, leading to a change in their physical properties. This can affect their performance and reduce efficiency.
3. Cantilevers not being released properly: In the fabrication process, the cantilevers are typically anchored to a substrate or sacrificial layer. To create a freestanding cantilever, the anchoring layer needs to be selectively removed so that the cantilever is released. If the release process is not done correctly, the cantilevers may remain partially or entirely attached to the substrate, affecting their functionality and efficiency.
It is important to note that these are probable causes, and the actual reason for the decreased efficiency would require a detailed analysis and investigation of the fabrication process and the resulting cantilever structures.