Which one of this option shows the correct alignment of alignment marks on wafer and mask? [Consider blue marks as alignment marks on wafer and black marks as alignment marks on mask]
I, V
I, V, VI
I, III, V
I, III, V, VI
To determine the correct alignment of alignment marks on a wafer and mask, we need to compare the positions of the blue marks (wafer alignment marks) and the black marks (mask alignment marks).
Let's go through each option and see which one shows the correct alignment:
Option I, V: This option suggests that the alignment marks on the wafer are aligned with the mask's V mark. However, this option does not specify the alignment of any other marks.
Option I, V, VI: This option states that the alignment marks on the wafer are aligned with the mask's V and VI marks. It includes the additional VI mark but does not mention other possible marks.
Option I, III, V: This option indicates that the alignment marks on the wafer are aligned with the mask's I, III, and V marks. It does not include the VI mark.
Option I, III, V, VI: This option suggests that the alignment marks on the wafer are aligned with the mask's I, III, V, and VI marks. This includes all the mentioned marks on both the wafer and the mask.
Based on the explanation above, the option that shows the correct alignment of alignment marks on the wafer and mask is: Option I, III, V, VI.